[{"data":1,"prerenderedAt":25},["ShallowReactive",2],{"page--/en-us/semiconductor/checklist-building-scalable-semiconductor-facilities":3,"sidebar-links-3de08d4d-aabd-01e8-9aeb-ab4788e50194":17,"breadcrumbs-/en-us/semiconductor/checklist-building-scalable-semiconductor-facilities":20},{"path":4,"slug":5,"type":6,"codename":7,"itemid":8,"title":9,"subpageCodenames":10,"language":11,"securePage":12,"domainAccessList":13,"secureRoles":14,"seriesLinkedItems":15,"group":16,"seoTitle":9},"/en-us/semiconductor/checklist-building-scalable-semiconductor-facilities","checklist-building-scalable-semiconductor-facilities","interior_page","checklist__building_scalable_semiconductor_facilit_3eb9a12","3eb9a124-9c68-45e2-aba6-04ccf6a0d321","Checklist: Building Scalable Semiconductor Facilities",[],"en-us",false,[],[],[],null,["Map",18,19],"warranties","/en-us/resources/product-information/warranties",[21,24],{"displayName":22,"url":23},"Semiconductor","/en-us/semiconductor",{"displayName":9,"url":4},1779334980921]